Fabrication and characterization of advanced probes for magnetic force microscopy

Advanced probes for magnetic force microscopy have been produced by e(-)-be am lithography and Arc-ion etching. The probes consist of individual CoCrPt , Fe, or Ni particles with a typical size of 100 X 100 X 100 nm(3) located at the tip apex of commercial cantilevers. They were compared to convention al thin film probes by performing magnetic force imaging on hard disc test patterns and soft garnet films. The advanced probes yield a considerable im provement in lateral resolution due to the three-dimensional confinement of the magnetically active tip volume. For soft magnetic samples the improvem ents are even more striking since the low stray field of the new probe allo ws nondestructive imaging at much smaller probe-sample spacing than achieva ble by conventional probes. (C) 1999 Elsevier Science B.V. All rights reser ved.