Determination of the pore size and the vertical structure of nanoporous aluminum oxide membranes

The pore geometry of nanoporous aluminum oxide membranes which were prepare d by anodization of aluminum in polyprotic acids were observed using focuse d ion beam technology (FIB) and high resolution scanning electron microscop y (SEM). For demonstration of the columnar structure of the nanopores, dept h profiles were prepared with the FIB technology. Based on the detailed inf ormation about the pore geometry, the inner surfaces of the pores were calc ulated. (C) 1999 Elsevier Science B.V. All rights reserved.