Three-dimensional diamond growth film simulations: correlations between nucleation and surface parameters

The development of a three-dimensional simulation of the diamond nucleation and growth presented in a previous payer has been used in this study to de termine surface parameters such as the roughness, R-a, and porosity (fillin g factor Q) of diamond film, according to the crystal size (via the radius R) and the nucleation density N. Evolutions of these surface parameters are compared to values obtained by a statistical treatment (Poisson's law) bas ed on the random nucleation and subsequent growth of hemispheres. In partic ular, we study the roughness variations with the parameter lambda=pi (RN)-N -2, which seems to be the key variable in the case of coatings whose nuclea tion and growth are in agreement with the Volmer-Weber mechanism. From thes e results, it is possible to calculate some surface parameters that are use ful for tribological and optical applications and whose evolutions with syn thesis time have not been reported to our knowledge. (C) 1999 Elsevier Scie nce S.A. All rights reserved.