Metal-nitride-oxide semiconductor (MNOS), metal-oxide semiconductor (MOS) a
nd metal-nitride semiconductor (MNS) devices have been fabricated on p-type
6H-SiC substrates without epitaxial layers. They have been characterised u
sing high frequency capacitance-voltage (CV), conductance-voltage (GV) and
current-voltage (IV) measurements. High frequency CV characteristics of SiC
MNOS structures exhibit a capacitance-voltage behaviour that is very simil
ar to high frequency CV characteristics of SiC MOS capacitors. Similar leak
age current characteristics compared with p-type 6H-SiC MNS structures have
been found for p-type 6H-SiC MNOS devices, but the SiO2/Si3N4 insulator cu
rrent is lower, particularly for positive electric fields. (C) 1999 Elsevie
r Science S.A. All rights reserved.