Investigation of ultrathin DLC film growth by a novel X-ray reflectivity technique and in situ ellipsometry

Authors
Kondrashov, PE Smirnov, IS Lukashov, YE Yablokov, SY Baranov, AM Dowling, DP Donnelly, K Flood, RV McConnell, ML
Citation
Pe. Kondrashov et al., Investigation of ultrathin DLC film growth by a novel X-ray reflectivity technique and in situ ellipsometry, DIAM RELAT, 8(2-5), 1999, pp. 532-537
Citations number
11
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
DIAMOND AND RELATED MATERIALS
ISSN journal
09259635 → ACNP
Volume
8
Issue
2-5
Year of publication
1999
Pages
532 - 537
Database
ISI
SICI code
0925-9635(199903)8:2-5<532:IOUDFG>2.0.ZU;2-Y
Abstract
The results of the investigation of growth processes of diamond-like carbon films by in situ and ex situ X-ray monitoring of reflectivity at the wavel ength 1.54 Angstrom are presented. Diamond-like carbon films were obtained by RF-plasma-enhanced chemical vapour deposition. The growth rate, thicknes s, density and roughness of films were calculated from the time dependence of reflectivity during deposition process. (C) 1999 Elsevier Science S.A. A ll rights reserved.