Mechanical and tribological properties of diamond-like carbon coatings films deposited from an electron cyclotron resonance plasma

The friction coefficients have been investigated in amorphous diamond-like carbon (DLC) films deposited by a dual ECR-r.f. method, as a function of r. f. substrate bias in relation with the H content and bonding. Combined infr ared absorption, elastic recoil detection analysis and tribological tests a re used to characterize fully the films in their as-deposited state. Fricti on coefficients (mu) of the coatings against sapphire balls are determined in air at room temperature. The results indicate clearly that the samples e xhibit high compressive stresses and the friction coefficients are found to be low and are affected by the magnitude of the biaxial stress and the mic rostructure of the films. (C) 1999 Published by Elsevier Science S.A. All r ights reserved.