XPS spectra of thin CNx films prepared by chemical vapor deposition

Carbon nitride (CNx) thin films with an N/C ratio of 0.605:0.522 have been synthesized using different sources as a ksilol, CCl4, N-2 and NH3 by PECVD (plasma enhanced chemical vapor deposition) and hot filament-CVD reactors. X-ray photoelectron spectroscopy (XPS) analyses, which give C-1s peaks wit h a maximum at 285.7 eV and 287 eV, typical for C-N bonds and sp(2) hybridi zation and C=N bonds and sp(3) hybridization, respectively. The observed an d N-1s peaks with a maximum at about 399 eV suggest the existence of differ ent C-N bonds and polycrystallite structure in the amorphous carbide matrix . The concentration of the different CN bonds varies, depending on the depo sition technique. (C) 1999 Elsevier Science S.A. All rights reserved.