3-D determination of the location and absolute amount of sp(2) and sp(3) bound carbon and stress components in CVD diamond films using multi-color polarized Raman spectroscopy

Various individual diamond crystals within polycrystalline diamond films de posited by the MPACVD technique were measured in all three dimensions using confocal multi-color polarized Raman spectroscopy, which allows unambiguou s determination of the amount and location of sp(2) and sp(3) bound carbon as well as stress components. Cross-sections clearly resemble the various g rowth setters, which are shaped like inverted pyramids. Stress found in the [100] growth sector is compressive while stress found in the [111] growth sector is tensile. The best diamond quality in terms of least amount of str ess and sp(2) bound carbon can be found in the apex of the [100] growth pyr amid. (C) 1999 Elsevier Science S.A. All rights reserved.