Md. Whitfield et al., Acoustic wave propagation in free standing CVD diamond: Influence of film quality and temperature, DIAM RELAT, 8(2-5), 1999, pp. 732-737
Acoustic wave propagation in high quality, free standing polycrystalline CV
D diamond wafers has been studied using a laser ultrasonic technique. The i
nfluence of wafer temperature in the range 30-250 degrees C on the propagat
ion characteristics of Lamb waves has been assessed. Acoustic wave propagat
ion characteristics showed little variation with temperature in the range m
easured suggesting that CVD diamond material of the type studied here may b
e suitable for the fabrication of acoustic wave devices operating at elevat
ed temperatures. Material parameters extracted from the acoustic signal tog
ether with SEM studies strongly suggest that void, microcrack and grain bou
ndary density rather than sp(2) content most influence the propagation of l
ow frequency Lamb waves in free standing CVD diamond films. (C) 1999 Elsevi
er Science S.A. All rights reserved.