General and self-consistent method for the calibration of polarization modulators, polarimeters, and Mueller-matrix ellipsometers

Calibration of polarization-state generators (PSG's), polarimeters, and Mue ller-matrix ellipsometers (MME's) is an important factor in the practical u se of these instruments. A new general procedure, the eigenvalue calibratio n method (ECM), is presented. It can calibrate any complete MME consisting of a PSG and a polarimeter that generate and measure, respectively, all the states of polarization of light. In the ECM, the PSG and the polarimeter a re described by two 4 X 4 matrices W and A, and their 32 coefficients are d etermined from three or four measurements performed on reference samples. T hose references are smooth isotropic samples and perfect linear polarizers. Their optical characteristics are unambiguously determined during the cali bration from the eigenvalues of the measured matrices. The ECM does not req uire accurate alignment of the various optical elements and does not involv e any first-order approximation. The ECM also displays an efficient error c ontrol capability that can be used to improve the MME behavior. The ECM is illustrated by an experimental calibration, at two wavelengths (458 and 633 nm), of a MME consisting of a coupled phase modulator associated with a pr ism division-of-amplitude polarimeter. (C) 1999 Optical Society of America. OCIS codes: 120.2130, 120.3930, 120.4640, 120.5410, 120.5820.