We propose a novel, to our knowledge, silicon planar-apertured probe array
as an optical head for high-density near-field optical storage. In comparis
on with a conventional fiber probe employed for near-field optical storage
the apertured probe array has a higher readout data-transmission rate and b
etter mechanical durability. A probe array with an aperture size of 100 nm
was fabricated by use of photolithography and wet etching of a silicon wafe
r. Subwavelength-readout capability was demonstrated by use of one aperture
of the probe array. Furthermore, we achieved a 16 times increase in the li
ght-transmission efficiency of the probe array by installing glass-sphere m
icrolenses on each aperture. The increase was confirmed by measurement of t
he near-field optical intensity. (C) 1999 Optical Society of America. OCIS
codes: 210.4680, 220.4000, 040.1240, 110.1220, 180.5810.