Emission microscope observation of FEAs

Electron emission from a FEA was magnified by making use of an emission mic roscope, and the uniformity of the electron emission was examined. By resol ving the electron emission from the each microtip, the stability of electro n emission from a single microtip was successfully measured. Magnification factors of 100 and spatial resolution of 6 mu m are achieved. The uniformit y of the electron emission from the microtips depends on the uniformity of microtip apex size. It also depends on the uniformity of geometrical arrang ement of the gate electrode and microtip. The emission stabilities of indiv idual microtips are different and the emitted electron current fluctuates l ike pulses. (C) 1999 Elsevier Science B.V. All rights reserved.