Application of the field emitter array to the vacuum measurements

Authors
Ogiwara, N Suganuma, K Miyo, Y Kobayashi, S Saito, Y
Citation
N. Ogiwara et al., Application of the field emitter array to the vacuum measurements, APPL SURF S, 146(1-4), 1999, pp. 234-238
Citations number
11
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
APPLIED SURFACE SCIENCE
ISSN journal
01694332 → ACNP
Volume
146
Issue
1-4
Year of publication
1999
Pages
234 - 238
Database
ISI
SICI code
0169-4332(199905)146:1-4<234:AOTFEA>2.0.ZU;2-O
Abstract
We have successfully used the Spindt field emitter array (FEA) in the press ure measurements in ultrahigh vacuum (UHV) and extremely high vacuum (XHV). For applying the FEA to pressure measurements, we have made evaluation tes ts, focusing on gas exposure and outgassing characteristics. The cold catho de hardly influenced the vacuum conditions, compared to a hot-filament cath ode. (C) 1999 Elsevier Science B.V. All rights reserved.