Many existing computer-aided design systems for microelectromechanical syst
ems require the generation of a three-dimensional mesh for computational an
alysis of the microdevice. Mesh generation requirements for microdevices ar
e very complicated because of the presence of mixed-energy domains. Point m
ethods or meshless methods do not require the generation of a mesh, and com
putational analysis can be performed by sprinkling points covering the doma
in of the microdevice. A corrected smooth particle hydrodynamics approach a
lso referred to as the reproducing kernel particle method is developed here
for microelectromechanical applications. A correction function that establ
ishes the consistency and the stability of the meshless method is derived.
a simple approach combining the constraint elimination and the Lagrange mul
tiplier technique is developed for imposition of boundary conditions. Numer
ical results are shown for static and dynamic analysis of microswitches and
electromechanical pressure sensors. The accuracy of the meshless method is
established by comparing the numerical results obtained with meshless meth
ods with previously reported experimental and numerical data.