A capacitive-type relative humidity sensor saving a double layer structureconsisting of a photocrosslinked PVCA and a PMMA film

A double layer structure sensor (DLS sensor) consisting of a photocrosslink ed PVCA and a PMMA film was prepared. Advantages of the photocrosslinked PV CA sensor and the PMMA sensor were reflected in the initial sensor performa nce of the DLS sensor. The sensing characteristics were affected by the thi ckness and the degree of crosslinking of the photocrosslinked PVCA layer. T here was an optimum PVCA film thickness (around 0.1 mu m) for reducing the effect of both instantaneous and long-term coexistent acetone vapor.