Demand has recently increased for very high-density packaging substrates fo
r high-pin-count area array chips, Our new high-density multilayer technolo
gy on printed circuit board (PCB), named deposited substrate on laminate (D
SOL) satisfies this demand, An important feature of the DSOL is dielectric
fabrication, which uses a new photosensitive material; an aromatic fluorene
unit bonded epoxy acrylate resin, The fluorene based resin has interesting
properties such as good electrical properties, low curing temperature (160
degrees C) for a heat-resistant resin (glass transition temperature, T-g =
230 degrees C), low coefficient of the thermal expansion (40 ppm), and exc
ellent via hole resolution, Very fine and high-aspect-ratio (>1.0) via hole
s mere formed through exactly the same process steps as those used for a co
nventional photosensitive epoxy resin; baking, exposure, and development wi
th an aqueous alkaline solution. Another important feature is the technolog
y, that patterns fine-pitch Cu conductors using a semi-additive process wit
h a sputtering method. The DSOL made 40 mu m very fine pitch Cu conductors
on large laminates (330 mm x 400 mm) possible, because this process was com
posed of flash wet etching of only 0.3 mu m thick sputtered thin-films. We
have successfully developed a high-density packaging substrate for high-pin
-count (4000 pins) area array application specific integrated circuit (ASIC
) chips.