Accurate high speed empirically based predictive modeling of deeply embedded gridded parallel plate capacitors fabricated in a multilayer LTCC process

A novel-technique is presented for the accurate, rapid, high frequency, pre dictive modeling of parallel plate capacitors with gridded plates manufactu red in a multilayer low: temperature cofired ceramic (LTCC) process. The me thod is, empirical in nature and is based on the concept of incrementally c onstructing the-model for a structure from :well characterized individual b uilding blocks. Building blocks are characterized by the use of test struct ures and measurements, and are modeled using:passive lumped circuit element s. This method is applied to the predictive modeling of deeply embedded gri dded parallel plate capacitor :structures. The procedure has been experimen tally verified, with accurate predictions of behavior. obtained up to the s econd self resonance for large ar;ea:gridded parallel plate capacitors. Sin ce lumped, element circuits are generated by this method, structure predict ion speed is determined by circuit size and simulator small signal analysis time. The method is versatile and is well suited for circuit design applic ations.