Ds. Yang et al., EXAFS study for the local ordering of (Ba, Sr)TiO3 thin films fabricated by single and double step processes, J PHYS JPN, 68(5), 1999, pp. 1737-1739
The local order of oxygen atoms around a titanium atom in (Ba, Sr)TiO3 (BST
) thin films fabricated by the single step and the double step processes wa
s studied by the extended X-ray absorption fine structure (EXAFS). This stu
dy shows that the double step process enhanced significantly the local orde
r of oxygen around the titanium atom. The increase of the local order reduc
ed the leakage current density and increased the breakdown field of the fil
m.