Coulomb interactions in a focused ion beam column and design guidelines for an experimental system: comparison of results from MONTEC and BOERSCH

Authors
Didenko, L Guharay, SK Orloff, J Melngailis, J
Citation
L. Didenko et al., Coulomb interactions in a focused ion beam column and design guidelines for an experimental system: comparison of results from MONTEC and BOERSCH, NUCL INST A, 427(1-2), 1999, pp. 121-125
Citations number
7
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT
ISSN journal
01689002 → ACNP
Volume
427
Issue
1-2
Year of publication
1999
Pages
121 - 125
Database
ISI
SICI code
0168-9002(19990511)427:1-2<121:CIIAFI>2.0.ZU;2-J
Abstract
We have made a comparison of the MONTEC(R) and BOERSCH(R) codes that are us ed to determine the space-charge properties of focused beams. The codes wer e compared by analyzing a focused ion beam system with a liquid metal ion s ource. The results for the statistical broadening of the ion beam were quit e similar, but there were some differences when taking into account global space charge and lens aberrations. (C) 1999 Elsevier Science B.V. All right s reserved.