A transmission electron microscopy (TEM) investigation of the morphology of
InxGa1-xAs quantum dots grown on a GaAs(001) substrate has been carried ou
t. The size and the shape of the quantum dots have been determined using br
ight-field images of cross-section TEM specimens and [001] on-zone bright-f
ield images with imaging simulation from plan-view TEM specimens. The resul
ts suggest that the coherent quantum dots are lens shaped with base diamete
rs of 25-40 nm and aspect ratios of height to diameter of 1:6-1:4. [S0163-1
829(99)00920-0].