Investigation of multilayer structures by means of charged-particle scattering

The possibilities for investigating multilayer mirror structures by nondest ructive nuclear techniques have been considered. For the example of a singl e-layer mirror, it has been shown that the presence of five nickel isotopes affects the shape of the Rutherford backscattering spectrum. The content o f these elements in a nickel layer is determined by using the technique of nuclear reactions on carbon and oxygen. The depth profiles have been establ ished for all major elements and impurities in the composition of mirror po larizing neutron monochromators based on FeCo/TiZr with a TiZrGd sublayer d eposited on glass. Surface roughness has been estimated on the basis of the same experimental spectra. The experimental results obtained in this study have been employed to refine technologies for manufacturing multilayer str uctures with improved polarizing features.