T. Goto et al., Characteristics of 63.6 degrees cylindrical energy analyzer used as chargeexchange neutral particle analyzer, REV SCI INS, 70(6), 1999, pp. 2661-2664
A charge exchange neutral particle analyzer including a newly designed mult
ichannel 63.6 degrees cylindrical electrostatic energy analyzer was constru
cted. Since the energy analyzer can simultaneously adopt a small radius of
cylindrical electrodes and a large width of an entrance slit, high incident
current can be analyzed while the size of the analyzer remain compact. Cha
racteristics of the analyzer were investigated using hydrogen beam with ene
rgies from about 0.5 to 5 keV. The experimental results are compared well w
ith the numerical analysis. (C) 1999 American Institute of Physics. [S0034-
6748(99)01906-1].