Complex surface treatment by powerful source of multi-component atomic fluxes

Surface treatment by a powerful source of multi-component atomic Bur;es is considered. The source can generate intensive fluxes of atoms: slow heavy ( metal-type) and fast heavy atoms and fast gas atoms simultaneously. The for mation and features of the atomic fluxes are described and discussed. The i ntensity of atomic fluxes generated is not limited by space charge and can reach 100 mA cm(-2). The atomic fluxes have high azimuthal uniformity (2 pi angle) and wide energy spectra. Slow heavy-atom flux and fast heavy-atom f lux are interrelated, and their correlation depends on the source parameter s. Various modes of surface treatment by these atomic fiuxes are discussed in detail. The model estimations and experimental results on surface treatm ent show the possibility of atomic implantation and of accelerated atom-bea m-assisted deposition (AABAD or ABAD) by the source. (C) 1999 Elsevier Scie nce S.A. All rights reserved.