A NEW FINITE-ELEMENT SOLUTION FOR PARAMETER EXTRACTION OF MULTILAYER AND MULTICONDUCTOR INTERCONNECTS

In this letter, the geometry-independent measured equation of invarian ce is adopted with the finite-element method for mesh truncation and i s successfully used in parameter extraction of interconnects. The majo r advantage is overcoming the tedious closed-form Green's function ded uction and disagreeable Sommerfeld integral calculation for multilayer and multiconductor structures. Moreover, the high-order finite-elemen t is employed to increase the accuracy and save computer resources. Fu rthermore, an optimizing numerical scheme, which is found to be very e fficient, is developed to solve finite-element equations.