A MICROMACHINED HIGH-Q X-BAND RESONATOR

Authors
PAPAPOLYMEROU J CHENG JC EAST J KATEHI LPB
Citation
J. Papapolymerou et al., A MICROMACHINED HIGH-Q X-BAND RESONATOR, IEEE microwave and guided wave letters, 7(6), 1997, pp. 168-170
Citations number
8
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
IEEE microwave and guided wave letters → ACNP
ISSN journal
10518207
Volume
7
Issue
6
Year of publication
1997
Pages
168 - 170
Database
ISI
SICI code
1051-8207(1997)7:6<168:AMHXR>2.0.ZU;2-3
Abstract
This letter presents a new structure which can be used as a microwave high-Q resonator for the development of narrow-band low-loss filters i n a planar environment. The resonator is made of a low-loss micromachi ned cavity which is easy to integrate with monolithic circuits. Compar ed to conventional metallic resonators, the performance of this resona tor is similar, but the weight and size are significantly reduced.