Miniaturized distance sensor fabricated by the LIGA process

Using LIGA-Technology a miniaturized distance sensor based on the triangula rion principle hers been fabricated. The sensor optic is realized in a mult imode waveguide structure by forming the sidewalls as lenses or mirrors foc using or collimating the light in vertical direction. Cylindrical LIGA lens es which are mounted into the waveguide structure form the beam in horizont al direction. The fabricated sensors allow to detect distances in between 2 mm and 6 mm. The highest sensitivity, is achieved in the range between 2.5 mm to 3.5 mm. These values can be changed by modification of the design.