Extension of the fluidized bed silicon CVD process to non-conventional operating conditions - Depositions on porous powders and or under reduced pressure

The applications field of the fluidized bed chemical vapor deposition proce ss has recently been extended towards an important industrial sector: the e laboration of supported catalysts. This necessitates non-conventionnal oper ating conditions, because depositions take place on porous powders, and und er reduced pressure. With the aim to analyze the possible modifications ind uced by these new working conditions, some experiments, and then simulation s have been done, using a well-known deposit, that of silicon from silane a nd disilane. The detailed analysis of results demonstrates the good applica bility of this process to this kind of elaborations.