In this paper we pursue the effect of the erbium and ytterium addition duri
ng the liquid phase epitaxial (LPE) growth on physical properties of thin I
nP layers. Series of InP layer samples were prepared by LPE from the melts
containing 0-0.3wt.% of Er and Yb. The grown layers were examined by the Ba
ll effect and C-V measurements, photoluminescence spectroscopy and Rutherfo
rd backscattering spectrometry (RBS). We have found that only Yb impurity w
as incorporated into the lattice of InP layer. With increasing Yb content i
n the growth melt the layer's conductivity smoothly changed from n to p typ
e when Yb admixture exceeded certain limit. On the basis of these results w
e prepared p-n junctions in the InP layers directly doped by Yb, and tested
then by C-V measurements.