H. Fukidome et al., In situ atomic force microscopy observation of dissolution process of Si(111) in oxygen-free water at room temperature, EL SOLID ST, 2(8), 1999, pp. 393-394
Si(111) surfaces were found to be easily flattened on an atomic scale by a
treatment with water from which oxygen was removed by addition of a chemica
l deoxygenator. By in situ atomic force microscope measurements of the Si(1
11) surface, we succeeded for the first time in observing the flow of the s
teps on the atomically flattened Si(111) surface in oxygen-free water. The
average step-flow rate was estimated to be 8 nm/min at room temperature. (C
) 1999 The Electrochemical Society. S1099-0062(98)12-022-9. All rights rese
rved.