Anomalous effect of trench-oxide depth on alpha-particle-induced charge collection

The effect of trench-oxide depth on the alpha-particle-induced charge colle ction is analyzed for the first time, From the simulation results, it was f ound that the depth of trench oxide has a considerable influence on the amo unt of collected charge. The confining of generated charge by the trench ox ide was identified as a cause of this anomalous effect. Therefore, the trad eoff between soft error rate and cell to cell isolation characteristics sho uld be considered in optimizing the depth of trench oxide.