Optical interconnects offer high speed and parallelism for efficient data c
ommunication within future electronic computers. This applies even for inte
rconnects over short distances, such as in inter- and intrachip communicati
on. Miniaturization and integration of optics are mandatory for an effectiv
e merger of optical and electronic functionalities. This paper gives an ove
rview of recent developments in fabrication techniques for micro-optical co
mponents and describes different types of system architectures, based on pr
inciples like guided wave optics, diffractive and refractive free space opt
ics and hybrid forms.