Absolute lattice parameter measurement

Authors
Fewster, PF
Citation
Pf. Fewster, Absolute lattice parameter measurement, J MAT S-M E, 10(3), 1999, pp. 175-183
Citations number
52
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
ISSN journal
09574522 → ACNP
Volume
10
Issue
3
Year of publication
1999
Pages
175 - 183
Database
ISI
SICI code
0957-4522(199905)10:3<175:ALPM>2.0.ZU;2-7
Abstract
Absolute lattice parameter methods are useful for determining alloy composi tion, understanding point defects and dopants in semiconductor substrate ma terials and for the evaluation of lattice relaxation in heteroepitaxial lay ers. This paper reviews the techniques available. The assumptions and uncer tainties of each technique are discussed.