O. De Melo et al., Low temperature growth of epitaxial CdSe thin films by an isothermal closed space sublimation technique using two elemental sources, MATER CH PH, 59(2), 1999, pp. 120-124
We present a novel low-cost technique for the epitaxial growth of thin film
s. Using a closed space isothermal vapor phase technique, we have grown CdS
e thin films on GaAs (100) substrates. The epitaxial growth is performed by
exposing the substrate to Cd and Se vapor from elemental sources in a cycl
ed manner. The thermodynamic and kinetic aspects of the process are discuss
ed, X-ray diffraction patterns confirm the epitaxial growth of CdSe films o
n the GaAs substrates. AFM images were obtained re, study the film morpholo
gies. (C) 1999 Published by Elsevier Science S.A. All rights reserved.