Optically polished surfaces parallel to the (220) lattice planes of silicon monocrystals

Authors
Bergamin, A Cavagnero, G Mana, G Massa, E Zosi, G
Citation
A. Bergamin et al., Optically polished surfaces parallel to the (220) lattice planes of silicon monocrystals, MEAS SCI T, 10(6), 1999, pp. 549-553
Citations number
12
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
MEASUREMENT SCIENCE & TECHNOLOGY
ISSN journal
09570233 → ACNP
Volume
10
Issue
6
Year of publication
1999
Pages
549 - 553
Database
ISI
SICI code
0957-0233(199906)10:6<549:OPSPTT>2.0.ZU;2-7
Abstract
An apparatus whereby silicon monocrystals, such as those used in x-ray opti cs, can be cut and optically polished accurately parallel to known lattice planes is described. A parallelism to within 10 mu rad has been obtained.