A new method (impact collision atom scattering spectroscopy with detection
of neutrals) suitable for structure analysis of highly insulating materials
is presented. The technique applies the same physical principles as 'class
ical' ion scattering spectroscopy (ISS) but instead of ions pie use neutral
atoms as projectiles. Surface charges upon insulators may still be present
but they have no effect on the trajectories of the neutral particles. In o
ur set-up we applied a completely new approach to neutralize the ion beam b
y small angle scattering (scattering angle 9 degrees) from a platinum(111)
surface. The usefulness of the method is demonstrated on both, Al(111) and
KBr(100) surfaces.