When optical microprobe spectroscopies, based on Raman or luminescence, are
used to study materials properties (such as composition or strain) that va
ry within the volume of material excited by the microprobe, it is necessary
to convolute the material property variation with the response function of
the microprobe to obtain the observable spectrum. A method for this convol
ution, in the general case in which the material shows significant absorpti
on of the incident light, is suggested and is shown to give acceptable inte
rpretation of test experiments on alumina and silicon single crystals.