Convolution of spectra in optical microprobe experiments

Citation
A. Atkinson et al., Convolution of spectra in optical microprobe experiments, SEMIC SCI T, 14(6), 1999, pp. 561-564
Citations number
14
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
ISSN journal
02681242 → ACNP
Volume
14
Issue
6
Year of publication
1999
Pages
561 - 564
Database
ISI
SICI code
0268-1242(199906)14:6<561:COSIOM>2.0.ZU;2-5
Abstract
When optical microprobe spectroscopies, based on Raman or luminescence, are used to study materials properties (such as composition or strain) that va ry within the volume of material excited by the microprobe, it is necessary to convolute the material property variation with the response function of the microprobe to obtain the observable spectrum. A method for this convol ution, in the general case in which the material shows significant absorpti on of the incident light, is suggested and is shown to give acceptable inte rpretation of test experiments on alumina and silicon single crystals.