The present work deals with effects of N+ ion implantation on the structure
and properties of TiN coatings used in the cutting tools industry: The cha
racterization was performed using glancing incidence X-ray diffraction (GIX
RD) and depth-sensing microindentation (ultra-microhardness). Results from
PVD-type films are compared with those obtained from CVD TiN. Amorphization
was noticed in the former, but not in the latter. Large changes in the res
idual stress and strain distributions are observed in the implanted zone an
d hardness measurements show a decrease in hardness after implantation with
nitrogen in both PVD and CVD films. The correlation between the tribologic
al data, nanohardness and the observed structural changes is presented and
discussed. (C) 1999 Elsevier Science S.A. All rights reserved.