Influence of an internal getter in silicon on the parameters of Au-Si structures

Authors
Kiselev, VK Obolenskii, SV Skupov, VD
Citation
Vk. Kiselev et al., Influence of an internal getter in silicon on the parameters of Au-Si structures, TECH PHYS, 44(6), 1999, pp. 724-725
Citations number
3
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
TECHNICAL PHYSICS
ISSN journal
10637842 → ACNP
Volume
44
Issue
6
Year of publication
1999
Pages
724 - 725
Database
ISI
SICI code
1063-7842(199906)44:6<724:IOAIGI>2.0.ZU;2-V
Abstract
It is shown that internal gettering of impurities and defects in Au-Si stru ctures can enhance their reliability and stabilize their characteristics. ( C) 1999 American Institute of Physics. [S1063-7842(99)02706-3].