Surface boron of heavily boron-doped polycrystalline diamond thin films was
found to be depleted upon annealing. Based on analyses using X-ray photoel
ectron spectroscopy, X-ray photoelectron energy loss spectroscopy, time-of-
flight secondary ion mass spectroscopy and Auger electron spectroscopy, sur
face boron was found to be removed when the diamond film was annealed at 50
0 degrees C in vacuum and continued to be eliminated at 900 degrees C. The
loss of surface boron undoubtedly altered the electronic properties of the
diamond surface. This phenomenon is important in the fabrication of diamond
-based electronic devices. (C) 1999 Elsevier Science S.A. All rights reserv
ed.