The values for the Avogadro constant N-A, derived from lattice spacing, den
sity, and molar mass of silicon single crystals at several metrological ins
titutes, show significant differences. To illuminate this discrepancy, comp
arison measurements of lattice spacing and density were performed. Positron
annihilation measurements were used to estimate the vacancy concentration
in Si samples. All crystals lead to nearly the same lattice spacing after c
orrection for the influence of carbon and oxygen impurities. It is proved t
hat the discrepancy in the determinations of the Avogadro constant cannot b
e explained by vacancies or interstitials. Also indications for macroscopic
bubbles or cavities could not be found.