Micromachined RF passive components and their applications in MMICs

Authors
Sun, YL Tauritz, JL Baets, RGF
Citation
Yl. Sun et al., Micromachined RF passive components and their applications in MMICs, INT J RF MI, 9(4), 1999, pp. 310-325
Citations number
18
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
INTERNATIONAL JOURNAL OF RF AND MICROWAVE COMPUTER-AIDED ENGINEERING
ISSN journal
10964290 → ACNP
Volume
9
Issue
4
Year of publication
1999
Pages
310 - 325
Database
ISI
SICI code
1096-4290(199907)9:4<310:MRPCAT>2.0.ZU;2-A
Abstract
The design, fabrication, and characterization of micromachined RF passive c omponents, including spiral inductors, Q- and L-enhanced inductors, and MIM capacitors, monolithically realized on suspended membranes in an f(T) = 15 GHz silicon bipolar process (DIMES-03) are described. The performance of a ctive inductors, active resonators, and oscillators incorporating suspended -membrane components is compared to that of conventional MMIC circuit reali zation. (C) 1999 John Wiley & Sons, Inc.