We report on measurements of two-dimensional potential distribution with na
nometer spatial resolution of operating light emitting diodes. By measuring
the contact potential difference between an atomic force microscope tip an
d the cleaved surface of the light emitting diode, we were able to measure
the device surface potential distribution. These measurements enable us to
accurately locate the metallurgical junction of the light emitting device,
and to measure the dependence of the built-in voltage on applied external b
ias. As the device is forward biased, the junction built-in voltage decreas
es up to flat band conditions, and then inverted. It is shown that the pote
ntial distribution across the pn junction is governed by self-absorption of
the sub-bandgap diode emission. (C) 1999 American Institute of Physics. [S
0021-8979(99)07113-3].