The low- and high-frequency capacitance-voltage characteristics of a select
ively doped AlxGa1-xAs/GaAs heterostructure containing deep traps in the Al
xGa1-xAs layer are calculated. It is shown that the low-frequency capacitan
ce-voltage characteristic features a rising portion when the deep traps are
localized at the heterointerface, this rising portion being due to the ons
et of emptying of the deep traps. The calculated results agree with the exp
erimental data. (C) 1999 American Institute of Physics. [S0021-8979(99)0151
3-3].