Failure estimation of semiconductor chip during wire bonding process

Citation
T. Ikeda et al., Failure estimation of semiconductor chip during wire bonding process, J ELEC PACK, 121(2), 1999, pp. 85-91
Citations number
8
Categorie Soggetti
Mechanical Engineering
Journal title
JOURNAL OF ELECTRONIC PACKAGING
ISSN journal
10437398 → ACNP
Volume
121
Issue
2
Year of publication
1999
Pages
85 - 91
Database
ISI
SICI code
1043-7398(199906)121:2<85:FEOSCD>2.0.ZU;2-H
Abstract
Wire bonding, a process of the connection between a semiconductor chip and a lead frame by a thin metal wire, is one of the important processes of ele ctronic packaging. This paper presents failure estimation of a silicon chip and ct GaAS chip during a gold wire bonding process. The gold wire bonding process is carried out by pressing a gold ball made at a tip of the gold w ire on a semiconductor chip and vibrating it by ultrasonic. High contact pr essure is useful for shortening the process cycle, but it sometimes causes failure of the semiconductor chip. Elastic-plastic large deformation contac t analyses are performed and the distributions of the stresses in these sem iconductor chips are investigated. The possibility of failure of a semicond uctor chip under usual wire bonding pressure is pointed out only for a GaAs chip.