Failure estimation of semiconductor chip during wire bonding process
Citation
T. Ikeda et al., Failure estimation of semiconductor chip during wire bonding process, J ELEC PACK, 121(2), 1999, pp. 85-91
Categorie Soggetti
Mechanical Engineering
Journal title
JOURNAL OF ELECTRONIC PACKAGING
SICI code
1043-7398(199906)121:2<85:FEOSCD>2.0.ZU;2-H
Abstract
Wire bonding, a process of the connection between a semiconductor chip and
a lead frame by a thin metal wire, is one of the important processes of ele
ctronic packaging. This paper presents failure estimation of a silicon chip
and ct GaAS chip during a gold wire bonding process. The gold wire bonding
process is carried out by pressing a gold ball made at a tip of the gold w
ire on a semiconductor chip and vibrating it by ultrasonic. High contact pr
essure is useful for shortening the process cycle, but it sometimes causes
failure of the semiconductor chip. Elastic-plastic large deformation contac
t analyses are performed and the distributions of the stresses in these sem
iconductor chips are investigated. The possibility of failure of a semicond
uctor chip under usual wire bonding pressure is pointed out only for a GaAs
chip.