MINIATURIZATION TECHNOLOGIES APPLIED TO ENERGY-SYSTEMS

An overview of the miniaturization technologies and their application to energy systems is presented. Based on the technologies referred to as MEMS (microelectromechanical systems) or MST (micro systems technol ogies), silicon based micromachining, deep X-ray lithography and the m icro mechanical machining processes (micro drilling, milling, cutting, electrical discharge machining, laser, focused ion beams, etc.) will be discussed in the context of application to fluid flow, heat transfe r, fluidics and energy systems. An overview of fundamental research an d applications will be made with emphasis on the work in the United St ates. The collaborative work in progress by the Institute for Microman ufacturing and the Pacific Northwest National Laboratories is highligh ted. In particular, the on-going development of a micro HVAC (heating, ventilating and air conditioning) system is given specific attention. Devices and/or systems such as micro heat pumps, heat pipes, evaporat ors, condensers, heat exchangers, compressors and the like will be pre sented. Advantages, disadvantages and the rationale for miniaturizatio n will be discussed. Current needs and markets will be discussed along with a discussion for future needs. (C) 1997 Elsevier Science Ltd.