A. Croll et al., The influence of static and rotating magnetic fields on heat and mass transfer in silicon floating zones, J ELCHEM SO, 146(6), 1999, pp. 2270-2275
Heat and mass transfer in float-zone processing are strongly influenced by
convective flows in the zone. They are caused by buoyancy convection, therm
ocapillary (Marangoni) convection, or artificial sources such as rotation a
nd radio-frequency heating. Flows in conducting melts can be controlled by
the use of magnetic fields, either by damping fluid motion with static fiel
ds or by generating a defined flow with rotating fields. The possibilities
of using static and rotating magnetic fields in silicon floating-zone growt
h have been investigated by experiments in axial static fields up to 5 T an
d in transverse rotating magnetic fields up to 7.5 mT Static fields of a fe
w 100 mT already suppress most striations but are detrimental to the radial
segregation by introducing a coring effect. A complete suppression of dopa
nt striations caused by time-dependent thermocapillary convection and a red
uction of the coring to insignificant values, combined with a shift of the
axial segregation profile toward a more diffusion-limited case, is possible
with static fields greater than or equal to 1 T. However, under certain co
nditions the use of high axial magnetic fields can lead to the appearance o
f a new type of pronounced dopant striations, caused by thermoelectromagnet
ic convection. The use of a transverse rotating magnetic field influences t
he microscopic segregation at quite low inductions, of the order of a few m
illitesla. The field shifts time-dependent flows and the resulting striatio
n patterns from a broad range of low frequencies at high amplitudes to a fe
w high frequencies at low amplitudes. (C) 1999 The Electrochemical Society.
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