Pd. Haworth et al., Interaction of a polyglycidol-based nonionic surfactant with silicon in hydrofluoric acid solutions, J ELCHEM SO, 146(6), 1999, pp. 2284-2288
The interaction of an alkyl polyglycidol surfactant with hydrogen-passivate
d silicon from dilute hydrofluoric acid solutions has been measured using w
ettability and attenuated total reflection Fourier transform infrared spect
roscopic techniques. The surfactant was found to be very effective in rende
ring hydrophobic hydrogen-terminated silicon hydrophilic in the hydrofluori
c acid solutions. The adsorption of the surfactant, and its desorption when
rinsed with deionized water, were very rapid. However, approximately 20% o
f the adsorbed surfactant remained on the silicon surface even after prolon
ged rinsing. (C) 1999 The Electrochemical Society. S0013-4651(98)08-001-X.
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