We observe a significant increase in InSb quantum-well mobility when remote
doping of Al0.09In0.91Sb barriers is accomplished by three layers, rather
than one layer, of Si delta doping. At 7 K, the electron mobility in single
quantum-well structures grown on GaAs substrates is as high as 280 000 cm(
2)/V s with an electron density of 2.33 x 10(11) cm(-2). The density of ori
ented abrupt steps and square-mound features on the sample surface correlat
es with the electron mobility in the well. (C) 1999 American Vacuum Society
. [S0734-211X(99)04203-1].