We investigated optical properties of GaAs/GaAs1-xPx(x similar or equal to
0.2) quantum wells (QWs) with each well width (L-w) of 2.7-10.0 nm grown on
(100) and (n11)A GaAs substrates (n=3, 4, 5) by molecular beam epitaxy wit
h the use of P-2 and As-4 molecular beams generated from polycrystalline Ga
p chunk and solid As sources. It was found that the P contents (x) in GaAs1
-xPx layers strongly depend on both the substrate orientation and substrate
temperature (T-s). In the whole range of the T-s (535-640 degrees C), the
largest P contents (x=0.19-0.23) were observed in the (411)A GaAs1-xPx laye
rs, and the (100) GaAs1-xPx layers showed the smallest x (0.08-0.18). The f
ull width at half maximum of photoluminescence (PL) peak (lambda = 758 nm)
from the (411)A GaAs/GaAsP QW with L-w = 2.7 nm was as small as 5 meV which
is only 66% of that of the (100) QW probably due to improved interface fla
tness of the (411)A QW. Furthermore, the PL intensities of the (411)A and (
311)A QWs were more than one order of magnitude larger in intensity than th
at of the (100) QWs. (C) 1999 American Vacuum Society. [S0734-211X(99)03403
-4].