Development of prototype micromechanical optical switch

Citation
M. Horino et al., Development of prototype micromechanical optical switch, JSME C, 41(4), 1998, pp. 978-982
Citations number
6
Categorie Soggetti
Mechanical Engineering
Journal title
JSME INTERNATIONAL JOURNAL SERIES C-MECHANICAL SYSTEMS MACHINE ELEMENTS AND MANUFACTURING
ISSN journal
13447653 → ACNP
Volume
41
Issue
4
Year of publication
1998
Pages
978 - 982
Database
ISI
SICI code
1344-7653(199812)41:4<978:DOPMOS>2.0.ZU;2-7
Abstract
A new mechanical optical switch with a latching function was fabricated on a planar lightwave circuits (PLCs) by combining three technologies: integra ted optics, micromachining on silicon or silica, and surface mounted actuat ors, The switching function is obtained by mechanical deflection of silica cantilevers driven by electromagnetic force. A prototype switch was made an d its performance was measured experimentally. The insertion loss was 4.4 d B, cross-talk was -40 dB, and switching time was 40 ms for a driving voltag e of 7 V and a current of 350 mA.